author = { Izumi, K. AND Ōmura, Y. AND Sakai, T. },

title = { Simox technology and its application to CMOS LSIS },

publisher = {Springer Science and Business Media LLC},

isbn = {0361-5235},

isbn = {1543-186X},

keywords = { Materials Chemistry , Electrical and Electronic Engineering , Condensed Matter Physics , Electronic, Optical and Magnetic Materials },

year = {1983},

url = { http://slubdd.de/katalog?TN_libero_mab2 }