author = { Basu, Nandita AND Bhat, K.N. },

title = { High pressure oxidation of Si(100) for production of ultrathin oxide metal-insulator-semiconductor diodes },

publisher = {Elsevier BV},

isbn = {0040-6090},

keywords = { Materials Chemistry , Metals and Alloys , Surfaces, Coatings and Films , Surfaces and Interfaces , Electronic, Optical and Magnetic Materials },

year = {1988},

url = { http://slubdd.de/katalog?TN_libero_mab2 }