author = { Sobe, Gerhard AND Neelmeijer, Antje AND Weise, Günter AND Heinrich, Armin },

title = { Process characterization with d.c. magnetron sputtering of CrSiC thin films in ArCH4 mixtures },

publisher = {Elsevier BV},

isbn = {0040-6090},

keywords = { Materials Chemistry , Metals and Alloys , Surfaces, Coatings and Films , Surfaces and Interfaces , Electronic, Optical and Magnetic Materials },

year = {1991},

url = { http://slubdd.de/katalog?TN_libero_mab2 }