author = { Horstmann, John T. AND Kallis, Klaus T. AND Fiedler, Horst L. },

title = { Experimental threshold voltage fluctuations of 30 nm-NMOS-transistors manufactured by a lithography independent structure definition process },

publisher = {Elsevier BV},

isbn = {0167-9317},

keywords = { Electrical and Electronic Engineering , Surfaces, Coatings and Films , Condensed Matter Physics , Atomic and Molecular Physics, and Optics , Electronic, Optical and Magnetic Materials },

year = {2009},

url = { http://slubdd.de/katalog?TN_libero_mab2 }