author = { Grzebyk, Tomasz AND Górecka-Drzazga, Anna AND Dziuban, Jan A. AND Dankovic, Tatjana AND Feinerman, Alan AND Busta, Heinz },

title = { Miniature Integrated High-vacuum MEMS },

publisher = {Elsevier BV},

isbn = {1877-7058},

keywords = { Industrial and Manufacturing Engineering },

year = {2014},

url = { http://slubdd.de/katalog?TN_libero_mab2 }