@misc
{TN_libero_mab2,
author = {
Gebhard, Maximilian
AND
Mai, Lukas
AND
Banko, Lars
AND
Mitschker, Felix
AND
Hoppe, Christian
AND
Jaritz, Montgomery
AND
Kirchheim, Dennis
AND
Zekorn, Christoph
AND
de los Arcos, Teresa
AND
Grochla, Dario
AND
Dahlmann, Rainer
AND
Grundmeier, Guido
AND
Awakowicz, Peter
AND
Ludwig, Alfred
AND
Devi, Anjana
},
title = {
PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
},
publisher = {American Chemical Society (ACS)},
isbn = {1944-8252},
isbn = {1944-8244},
year = {2018},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}