author = { Kundrata, Ivan AND Mošková, Antónia AND Moško, Martin AND Mičušík, Matej AND Dobročka, Edmund AND Fröhlich, Karol },

title = { Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory },

publisher = {American Vacuum Society},

isbn = {0734-2101},

isbn = {1520-8559},

keywords = { Surfaces, Coatings and Films , Surfaces and Interfaces , Condensed Matter Physics },

year = {2021},

url = { http://slubdd.de/katalog?TN_libero_mab2 }