author = { Helmbrecht, Michael A. AND He, Min AND Kempf, Carl J. AND Rhodes, Patrick },

title = { The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM },

publisher = {SPIE},

isbn = {0277-786X},

year = {2009},

url = { http://slubdd.de/katalog?TN_libero_mab2 }