author = { Lin, Qinghuang AND Simpson, Logan L. AND Steinhaeusler, Thomas AND Wilder, Michelle AND Willson, C. Grant AND Havard, Jennifer M. AND Frechet, Jean M. J. },

title = { Water-soluble resist for environmentally friendly lithography },

publisher = {SPIE},

isbn = {0277-786X},

year = {1996},

url = { http://slubdd.de/katalog?TN_libero_mab2 }