author = { Lin, Qinghuang AND Katnani, Ahmad D. AND Willson, C. Grant },

title = { Effects of crosslinking agent on lithographic performance of negative-tone resists based on poly(p-hydroxystyrene) },

publisher = {SPIE},

isbn = {0277-786X},

year = {1997},

url = { http://slubdd.de/katalog?TN_libero_mab2 }