author = { Lin, Qinghuang AND Sooriyakumaran, Ratnam AND Huang, Wu-Song },

title = { Toward controlled resist line-edge roughness: material origin of line-edge roughness in chemically amplified positive-tone resists },

publisher = {SPIE},

isbn = {0277-786X},

year = {2000},

url = { http://slubdd.de/katalog?TN_libero_mab2 }