author = { Fallica, Roberto AND Nannarone, Stefano AND Mahne, Nicola AND Malvezzi, Andrea Marco AND Berti, Andrea AND Simone, Danilo De },

title = { Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists },

publisher = {Technical Association of Photopolymers, Japan},

isbn = {0914-9244},

isbn = {1349-6336},

keywords = { Materials Chemistry , Organic Chemistry , Polymers and Plastics },

year = {2021},

url = { http://slubdd.de/katalog?TN_libero_mab2 }