author = { Poggi, Antonella AND Susi, E. },

title = { Surface Damage Induced by Reactive Ion Etching in n- Type Silicon },

publisher = {Trans Tech Publications, Ltd.},

isbn = {1662-9779},

keywords = { Condensed Matter Physics , General Materials Science , Atomic and Molecular Physics, and Optics },

year = {1995},

url = { http://slubdd.de/katalog?TN_libero_mab2 }