@misc
{TN_libero_mab2,
author = {
Job, Reinhart
AND
Fahrner, Wolfgang R.
AND
Ulyashin, Alexander G.
AND
Bumay, Yu.A.
AND
Ivanov, A.I.
AND
Palmetshofer, L.
},
title = {
Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
},
publisher = {Trans Tech Publications, Ltd.},
isbn = {1662-9779},
keywords = {
Condensed Matter Physics
,
General Materials Science
,
Atomic and Molecular Physics, and Optics
},
year = {1997},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}