%0 Generic
%T Micro-Optics and MOEMS 22-24 May 2018, Beijing, China
%A Micro-Optics and MOEMS Veranstaltung 2018 Peking
%A Zhong guo guang xue gong cheng xue hui
%A Zhongguo-Yuhang-Xuehui Guangdian-Jishu-Zhuanye-Weiyuanhui
%A SPIE
%A SPIE
%A Wang, Yuelin
%A Xie, Huikai
%I SPIE
%@ 9781510623392
%K Konferenzschrift
%K MEMS
%K Mikrooptik
%D [2018]
%X Teilkonferenz des International Symposium on Optoelectronic Technology and Application (OTA 2018)
%X Literaturangaben
%C SPIE
%C Bellingham, Washington, USA
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation