%0 Book
%T Proceedings of the Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films [held October 20 - 24, 1986, in San Diego, Calif.]
%A Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2 1986 San Diego, Calif
%A Kapoor, Vik J.
%A Hankins, Kevin T.
%I Electrochemical Society
%K Thin film devices Congresses
%K Thin film devices
%K Congresses
%K Silicon nitride
%K Silicon dioxide
%K Electric insulators and insulation
%K Thin films
%K Konferenzschrift
%D 1987
%X Spine title: Silicon nitride and silicon dioxide thin insulating films
%X Includes bibliographies and indexes
%C Electrochemical Society
%C Pennington, NJ
%U http://slubdd.de/katalog?TN_libero_mab2
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