%0 Book
%T Proceedings of the First International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications [held at the Phoenix, AZ, Meeting of the Electrochemical Society, October 13-18, 1991]
%A International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications 1 1991 Phoenix, Ariz
%A Electrochemical Society Electronics Division
%A Electrochemical Society Dielectric Science and Technology Division
%A Electrochemical Society
%A Gösele, Ulrich
%I Electrochemical Society
%@ 1566770084
%K Semiconductor wafers Congresses
%K Semiconductors
%K Bonding
%K Congresses
%K Semiconductor
%K Konferenzschrift 1991 Phoenix, Ariz.
%K Wafer
%K Bonden
%D 1992
%X Includes bibliographical references and indexes
%C Electrochemical Society
%C Pennington, NJ
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation