%0 Book
%T Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach. Reinhardsbrunn 23-29 Oct. 1977 = Sbornik dokladov
%A International Conference on Ion Implantation in Semiconductors 1977 Reinhardsbrunn
%A Hohmuth, Karl
%I Zentralinst.f. Kernforschung
%K Konferenzschrift
%D 19XX-
%C Zentralinst.f. Kernforschung
%C Dresden
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