%0
Book
%T
Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach.
Reinhardsbrunn 23-29 Oct. 1977 = Sbornik dokladov
%A International Conference on Ion Implantation in Semiconductors 1977 Reinhardsbrunn
%A Hohmuth, Karl
%I Zentralinst.f. Kernforschung
%K Konferenzschrift
%D 19XX-
%C Zentralinst.f. Kernforschung
%C Dresden