%0 Book
%T Proceedings of the second international symposium on very large scale integration science and technology materials for high speed, high density applications; VLSI science and technology 1984 : [May 6 - 11th, 1984, Cicinatti, Ohio]]
%A International Symposium on Very Large Scale Integration Science and Technology 2 1984 Cincinnati, Ohio
%A Electrochemical Society
%A Bean, Kenneth E.
%A Rozgonyi, George A.
%I Electrochemical Society
%K Integrated circuits
%K Very large scale integration
%K Konferenzschrift
%D 1984
%X Includes bibliographies and indexes
%C Electrochemical Society
%C Pennington, NJ
%U http://slubdd.de/katalog?TN_libero_mab2
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