%0 Book
%T Proceedings of the First International Symposium on Electrochemical Microfabrication [... held October 14 - 16 in Phoenix, Arizona ...]
%A International Symposium on Electrochemical Microfabrication 1 1991 Phoenix, Ariz
%A Electrochemical Society Electrodeposition Division
%A Datta, Madhav
%A Sheppard, Keith
%A Snyder, Dexter D.
%I Electrochemical Society
%@ 1566770025
%K Microelectronics
%K Congresses
%K Electrochemistry, Industrial
%K Masks (Electronics)
%K Silicon
%K Microfabrication
%K Konferenzschrift
%D 1992
%X Includes bibliographical references and indexes
%C Electrochemical Society
%C Pennington, N.J.
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation