%0 Book
%T Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide thin Insulating Films [held May 23 - 27, 1994 in San Francisco, California]
%A Electrochemical Society Dielectric Science and Technology Division
%A Electrochemical Society Electronics Division
%A Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 3 1994 San Francisco, Calif
%A Kapoor, Vik J.
%A Brown, William D.
%I Electrochemical Society
%@ 1566770483
%K Thin film devices
%K Congresses
%K Silicon nitride
%K Silicon dioxide
%K Electric insulators and insulation
%K Thin films
%K Konferenzschrift
%K Siliciumnitrid
%K Siliciumdioxid
%K Dünne Schicht
%D 1994
%X Includes bibliographies and indexes
%C Electrochemical Society
%C Pennington, NJ
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation