%0 Book
%T ULSI science and Technology 1995 proceedings of the Fifth International Symposium on Ultra Large Integration Science and Technology
%A Electrochemical Society Electronics Division
%A International Symposium on Ultra Large Scale Integration Science and Technology 5 1995 Reno, Nev
%A Middlesworth, Edward M.
%A Massoud, Hisham Z.
%I Electrochemical Society
%@ 1566770998
%K Integrated circuits
%K Ultra large scale integration
%K Congresses
%K Konferenzschrift
%K ULSI
%D 1995
%X Electronics Division
%X Includes bibliographical references and index
%C Electrochemical Society
%C Pennington, NJ
%U http://slubdd.de/katalog?TN_libero_mab2
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