%0 Book
%T Crystal growth and evaluation of silicon for VLSI and ULSI
%A Eranna, Golla
%7 First issued in paperback
%I CRC Press
%@ 9781138034198
%@ 9781482232813
%D 2016
%C CRC Press
%C Boca Raton
%U http://slubdd.de/katalog?TN_libero_mab2
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