%0 Book
%T Integrated circuit mask technology
%A Elliott, David J.
%I McGraw-Hill
%@ 0070192618
%K Electronic equipment. Integrated circuits. High resolution masks
%K Integrierte Schaltung
%K Maskentechnik
%D 1985
%X Includes index
%C McGraw-Hill
%C New York [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
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