%0 Book
%T CMOS cantilever sensor systems atomic force microscopy and gas sensing applications
%A Lange, Dirk
%A Brand, Oliver
%A Baltes, Henry
%I Springer
%@ 3540431438
%K Microelectromechanical systems Design and construction
%K Metal oxide semiconductors, Complementary Design and construction
%K Levers Design and construction
%K Atomic force microscopy Equipment and supplies Design and construction
%K Gas detectors Design and construction
%K Sensorsystem
%K CMOS
%K Rasterkraftmikroskopie
%K Gassensor
%D 2002
%X Literaturverz. S. [131] - 140
%C Springer
%C Berlin
%U http://slubdd.de/katalog?TN_libero_mab2
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