%0 Generic
%T IEEE micro electro mechanical systems an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994
%A IEEE Workshop on Micro Electro Mechanical Systems (1994 :Ōiso-machi, Japan)
%A American Society of Mechanical Engineers Dynamic Systems and Control Division
%A IEEE Robotics and Automation Society
%A Micromachine Center (Japan)
%I [Institute of Electrical and Electronics Engineers]
%@ 0780318358
%@ 078031834X
%@ 0780318331
%@ 9780780318359
%@ 9780780318342
%@ 9780780318335
%K Electromechanical devices Congresses
%K Detectors Congresses
%K Microelectronics Congresses
%K Actuators Congresses
%K Konferenzschrift
%D 2011
%X Includes bibliographical references and index
%X Use copy Restrictions unspecified star MiAaHDL
%C [Institute of Electrical and Electronics Engineers]
%C [New York]
%U http://slubdd.de/katalog?TN_libero_mab2
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