%0 Generic
%T Development and metrology of extreme ultraviolet and soft x-ray multilayer mirrors
%A Sertsu, Mewael Giday
%A Nicolosi, Piergiorgio
%A Juschkin, Larissa
%I Universitätsbibliothek der RWTH Aachen
%K Metrology
%K Grazing incidence
%K Sun--Corona
%K Coatings
%K Optics
%D 2018
%C Universitätsbibliothek der RWTH Aachen
%C Aachen
%U http://slubdd.de/katalog?TN_libero_mab2
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