%0 Generic
%T Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures
%A Ligl, Jana
%A Leone, Stefano
%A Manz, Christian
%A Kirste, Lutz
%A Doering, Philipp
%A Fuchs, Theodor
%A Prescher, Mario
%A Ambacher, Oliver
%I AIP Publishing
%@ 0021-8979
%@ 1089-7550
%D 2020
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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