%0 Generic
%T Hydrogenation of p+ poly-Si by Al2O3 nanolayers prepared by atomic layer deposition
%A Theeuwes, Roel J.
%A Melskens, Jimmy
%A Beyer, Wolfhard
%A Breuer, Uwe
%A Gutjahr, Astrid
%A Mewe, Agnes A.
%A Macco, Bart
%A Kessels, Wilhelmus M. M.
%I AIP Publishing
%@ 0021-8979
%@ 1089-7550
%K General Physics and Astronomy
%D 2023
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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