%0 Generic
%T Experimental study of the minimum metal gate thickness required to fix the effective work function in metal-oxide-semiconductor capacitors
%A Fillot, F.
%A Maîtrejean, S.
%A Matko, I.
%A Chenevier, B.
%I AIP Publishing
%@ 0003-6951
%@ 1077-3118
%K Physics and Astronomy (miscellaneous)
%D 2008
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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