%0 Generic
%T Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H2discharges
%A Strahm, B
%A Howling, A A
%A Sansonnens, L
%A Hollenstein, Ch
%I IOP Publishing
%@ 0963-0252
%@ 1361-6595
%K Condensed Matter Physics
%D 2007
%C IOP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation