%0 Generic
%T Simox technology and its application to CMOS LSIS
%A Izumi, K.
%A Ōmura, Y.
%A Sakai, T.
%I Springer Science and Business Media LLC
%@ 0361-5235
%@ 1543-186X
%K Materials Chemistry
%K Electrical and Electronic Engineering
%K Condensed Matter Physics
%K Electronic, Optical and Magnetic Materials
%D 1983
%C Springer Science and Business Media LLC
%U http://slubdd.de/katalog?TN_libero_mab2
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