%0 Generic
%T Investigation of arsenic-implanted silicon by optical reflectometry
%A Stavrov, V.I.
%A Varbanov, R.
%A Vasiliev, O.
%A Berova, D.
%I Elsevier BV
%@ 0042-207X
%K Surfaces, Coatings and Films
%K Condensed Matter Physics
%K Instrumentation
%D 1991
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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