%0 Generic
%T Ion beam sputtering of germanium – Energy and angular distribution of sputtered and scattered particles
%A Feder, Rene
%A Bundesmann, Carsten
%A Neumann, Horst
%A Rauschenbach, Bernd
%I Elsevier BV
%@ 0168-583X
%K Instrumentation
%K Nuclear and High Energy Physics
%D 2014
%C Elsevier BV
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