%0
Generic
%T
Ion beam sputtering of germanium – Energy and angular distribution of sputtered and scattered particles
%A Feder, Rene
%A Bundesmann, Carsten
%A Neumann, Horst
%A Rauschenbach, Bernd
%I Elsevier BV
%@ 0168-583X
%K Instrumentation
%K Nuclear and High Energy Physics
%D 2014
%C Elsevier BV