%0 Generic
%T Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers
%A Lorenz, Pierre
%A Ehrhardt, Martin
%A Wehrmann, Anja
%A Zimmer, Klaus
%I Elsevier BV
%@ 0169-4332
%K Surfaces, Coatings and Films
%K Condensed Matter Physics
%K Surfaces and Interfaces
%K General Physics and Astronomy
%K General Chemistry
%D 2012
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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