%0 Generic
%T Low-temperature Interconnection of PVD-Aluminium Metallization
%A Geipel, Torsten
%A Kumm, Julia
%A Moeller, Monja
%A Kroely, Laurent
%A Kraft, Achim
%A Eitner, Ulrich
%A Wolf, Andreas
%A Zhang, Zhenhao
%A Wohlfahrt, Peter
%I Elsevier BV
%@ 1876-6102
%K General Earth and Planetary Sciences
%K General Environmental Science
%D 2016
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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