%0
Generic
%T
Miniature Integrated High-vacuum MEMS
%A Grzebyk, Tomasz
%A Górecka-Drzazga, Anna
%A Dziuban, Jan A.
%A Dankovic, Tatjana
%A Feinerman, Alan
%A Busta, Heinz
%I Elsevier BV
%@ 1877-7058
%K Industrial and Manufacturing Engineering
%D 2014
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2