%0 Generic
%T Flip chip MEMS microphone package with large acoustic reference volume
%A Feiertag, Gregor
%A Pahl, Wolfgang
%A Winter, Matthias
%A Leidl, Anton
%A Seitz, Stefan
%A Siegel, Christian
%A Beer, Andreas
%I Elsevier BV
%@ 1877-7058
%K Industrial and Manufacturing Engineering
%D 2010
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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