%0 Generic
%T Some investigations in holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)
%A Wernicke, Günther
%A Bouamama, Larbi
%A Kruschke, Oliver
%A Demoli, Nazif
%A Gruber, Hartmut
%A Krüger, Sven
%I Elsevier BV
%@ 0143-8166
%D 2001
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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