%0 Generic
%T Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory
%A Kundrata, Ivan
%A Mošková, Antónia
%A Moško, Martin
%A Mičušík, Matej
%A Dobročka, Edmund
%A Fröhlich, Karol
%I American Vacuum Society
%@ 0734-2101
%@ 1520-8559
%K Surfaces, Coatings and Films
%K Surfaces and Interfaces
%K Condensed Matter Physics
%D 2021
%C American Vacuum Society
%U http://slubdd.de/katalog?TN_libero_mab2
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