%0 Generic
%T Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
%A Palov, Alexander P.
%A Baklanov, Mikhail R.
%A Wei, Shuhua
%I American Vacuum Society
%@ 2166-2746
%@ 2166-2754
%K Materials Chemistry
%K Electrical and Electronic Engineering
%K Surfaces, Coatings and Films
%K Process Chemistry and Technology
%K Instrumentation
%K Electronic, Optical and Magnetic Materials
%D 2019
%C American Vacuum Society
%U http://slubdd.de/katalog?TN_libero_mab2
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