%0 Generic
%T Combined TMAH and HF sacrificial layer etching technique for surface micromachined devices
%A Lisec, Thomas
%A Kreutzer, Martin
%A Wenk, Beatrice
%A Wagner, Bernd
%I SPIE
%@ 0277-786X
%D 1995
%C SPIE
%U http://slubdd.de/katalog?TN_libero_mab2
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