%0 Generic
%T Effects of crosslinking agent on lithographic performance of negative-tone resists based on poly(p-hydroxystyrene)
%A Lin, Qinghuang
%A Katnani, Ahmad D.
%A Willson, C. Grant
%I SPIE
%@ 0277-786X
%D 1997
%C SPIE
%U http://slubdd.de/katalog?TN_libero_mab2
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