%0 Generic
%T AirJet paper mover: an example of mesoscale MEMS
%A Biegelsen, David K.
%A Berlin, Andrew A.
%A Cheung, Patrick
%A Fromherz, Markus P.
%A Goldberg, David
%A Jackson, Warren B.
%A Preas, Bryan
%A Reich, James
%A Swartz, Lars E.
%I SPIE
%@ 0277-786X
%D 2000
%C SPIE
%U http://slubdd.de/katalog?TN_libero_mab2
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