%0 Generic
%T Room-Temperature Formation of Hard BCx Films by Low Power Magnetron Sputtering
%A Sulyaeva, Veronica
%A Khomyakov, Maxim
%A Kosinova, Marina
%I MDPI AG
%@ 2076-3417
%K Fluid Flow and Transfer Processes
%K Computer Science Applications
%K Process Chemistry and Technology
%K General Engineering
%K Instrumentation
%K General Materials Science
%D 2021
%C MDPI AG
%U http://slubdd.de/katalog?TN_libero_mab2
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