%0 Generic
%T Surface Energy and Wetting Behaviour of Plasma Etched Porous SiCOH Surfaces and Plasma Etch Residue Cleaning Solutions
%A Ahner, Nicole
%A Schaller, Matthias
%A Bartsch, Christin
%A Baryschpolec, Eugene
%A Schulz, Stefan E.
%I Trans Tech Publications, Ltd.
%@ 1662-9779
%K Condensed Matter Physics
%K General Materials Science
%K Atomic and Molecular Physics, and Optics
%D 2009
%C Trans Tech Publications, Ltd.
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