%0 Generic
%T Surface Damage Induced by Reactive Ion Etching in n- Type Silicon
%A Poggi, Antonella
%A Susi, E.
%I Trans Tech Publications, Ltd.
%@ 1662-9779
%K Condensed Matter Physics
%K General Materials Science
%K Atomic and Molecular Physics, and Optics
%D 1995
%C Trans Tech Publications, Ltd.
%U http://slubdd.de/katalog?TN_libero_mab2
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