%0 Generic
%T Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
%A Job, Reinhart
%A Fahrner, Wolfgang R.
%A Ulyashin, Alexander G.
%A Bumay, Yu.A.
%A Ivanov, A.I.
%A Palmetshofer, L.
%I Trans Tech Publications, Ltd.
%@ 1662-9779
%K Condensed Matter Physics
%K General Materials Science
%K Atomic and Molecular Physics, and Optics
%D 1997
%C Trans Tech Publications, Ltd.
%U http://slubdd.de/katalog?TN_libero_mab2
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