%0 Generic
%T Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements
%A Giebel, Friederike Julia
%A Köhle, Marcel
%A Stramm, Till
%A Kallis, Klaus T.
%A Fiedler, Horst L.
%I Copernicus GmbH
%@ 2194-878X
%K Electrical and Electronic Engineering
%K Instrumentation
%D 2017
%C Copernicus GmbH
%U http://slubdd.de/katalog?TN_libero_mab2
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