@book
{TN_libero_mab2,
author = {
},
title = {
Sputtering by particle bombardment
3 Characteristics of sputtered particles, technical applications / with contrib. by R. Behrisch ...
},
publisher = {Springer},
isbn = {3540534288},
isbn = {0387534288},
year = {1991},
booktitle = {Topics in applied physics ; 64},
address = {
Berlin
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}